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Accurate localization method for subaperture stitching interferometry in aspherical optics metrology.

Zhuo Zhao1, Bing Li1, Xiaoqin Kang1

  • 1State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, No. 99 Yanxiang Road, Yanta District, Xi'an, Shaanxi 710054, China.

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A new method improves aspherical metrology accuracy by precisely localizing subapertures in Annular Stitching Subaperture Interferometry (ASSI). This technique minimizes errors from machining and Cat

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Area of Science:

  • Optical Engineering
  • Metrology
  • Precision Manufacturing

Background:

  • Aspherical optics offer superior performance but require precise metrology.
  • Subaperture Stitching Interferometry (SSI) and Annular Stitching Subaperture Interferometry (ASSI) are key testing methods.
  • ASSI is efficient for rotational symmetry but susceptible to localization errors.

Purpose of the Study:

  • To propose an accurate subaperture localization method for ASSI.
  • To overcome measurement errors caused by machining and Cat's eye location inaccuracies.
  • To enhance the precision of aspherical metrology.

Main Methods:

  • Developed a localization method based on maximum asphericity between a reference sphere and the aspherical surface.
  • Calculated the theoretical optimal reference sphere location using minimum peak-to-valley (PV) asphericity.
  • Determined compensation quantity by comparing theoretical and actual minimum PV values from practical tests.

Main Results:

  • The proposed method accurately compensates for subaperture location coordinates.
  • Experimental results demonstrate improved measurement accuracy in ASSI.
  • The new method effectively eliminates errors, yielding more desirable outcomes than conventional approaches.

Conclusions:

  • The accurate localization method significantly enhances ASSI measurement precision.
  • Error elimination through precise subaperture positioning is crucial for aspherical metrology.
  • This technique offers a more reliable approach for testing aspherical optics.