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State of the Art and Future Perspectives in Advanced CMOS Technology

Henry H Radamson1,2,3,4, Huilong Zhu1, Zhenhua Wu1

  • 1Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China.

Nanomaterials (Basel, Switzerland)
|August 14, 2020
PubMed

Keywords:
CMOSepitaxynano-scale transistorsprocess integration

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