¹⁰B Conformal Doping for Highly Efficient Thermal Neutron Detectors.

Area of Science:

• Semiconductor device physics
• Nuclear instrumentation

Background:

• Traditional planar detectors have limitations in neutron detection efficiency.
• Microstructured silicon diodes offer potential for improved performance.

Purpose of the Study:

• To develop a conformal doping strategy for microstructured silicon diodes.
• To enhance neutron detection efficiency using enriched Boron-10 (¹⁰B).

Main Methods:

• Utilized Monte-Carlo nuclear particle (MCNP) code simulations for efficiency calculations.
• Implemented a high-temperature anneal in ¹⁰B-filled diodes for sidewall doping.
• Fabricated microstructured silicon diodes with conformal p⁺ layer.

Main Results:

• Achieved a thermal neutron detection efficiency of approximately 21% in microstructured diodes.
• Demonstrated significantly higher efficiency compared to planar detectors (∼3.5%).
• Observed lower leakage current due to conformal doping.

Conclusions:

• The conformal ¹⁰B doping strategy is effective for enhancing neutron sensitivity in microstructured silicon diodes.
• This method provides a pathway for developing next-generation neutron detectors with superior performance.