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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Microfabrication

    Background:

    • Fabry-Perot microcavities are crucial optical components.
    • Existing fabrication methods often face limitations in scale and accessibility.
    • Open-access microcavities are desirable for integrated fluidic applications.

    Purpose of the Study:

    • To develop a monolithic fabrication approach for large-scale arrays of high-finesse Fabry-Perot microcavities.
    • To create microcavities with open access to the air core for fluidic integration.
    • To demonstrate the optical performance and fluidic capabilities of the fabricated microcavities.

    Main Methods:

    • Utilized a stress-driven buckling self-assembly technique for half-symmetric curved-mirror cavity formation.
    • Employed a dry etching process to create micropores in the upper mirror for fluid access.
    • Characterized optical properties including finesse and mode structure.

    Main Results:

    • Successfully fabricated large-scale arrays of high-finesse (finesse ~2500) microcavities.
    • Demonstrated highly predictable Laguerre-Gaussian modes within the cavities.
    • Confirmed the ability to introduce liquids into the cavity via microinjection through pores.

    Conclusions:

    • The monolithic fabrication approach yields high-quality, open-access microcavities.
    • The demonstrated fluidic integration opens possibilities for microcavity-based sensing and optofluidics.
    • Potential applications span sensing, optofluidics, and cavity quantum electrodynamics.