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Updated: Dec 12, 2025

Measurement and Analysis of Atomic Hydrogen and Diatomic Molecular AlO, C2, CN, and TiO Spectra Following Laser-induced Optical Breakdown
Published on: February 14, 2014
Time- and space-resolved optical Stark spectroscopy in the afterglow of laser-produced tin-droplet plasma
J Scheers1,2, R Schupp1, R Meijer1,2
1Advanced Research Center for Nanolithography, Science Park 110, 1098 XG Amsterdam, The Netherlands.
Abstract:
The afterglow emission from Nd:YAG-laser-produced microdroplet-tin plasma is investigated, with a focus on analyzing Stark effect phenomena and the dynamical evolution of the plasma. Time- and space-resolved optical imaging spectroscopy is performed on 11 lines from Sn i-iv ions, in the 315-425-nm wavelength range. Stark shift-to-width ratios serve as the basis for unambiguous experimental tests of atomic physics theory predictions. Experiment and theory, where available, are found to be in poor agreement, and are in disagreement regarding the sign of the ratio in several cases. Spectroscopic measurements of the Stark widths in tandem with Saha-Boltzmann fits to Sn i and Sn ii lines, establish the evolution of the local temperature and density of the plasma afterglow, 20-40 ns after the end of the 15-ns-long temporally box-shaped laser pulse. A clear cool-down from ∼2 to 1 eV is observed of the plasma in this time window, having started at ∼30 eV when emitting extreme-ultraviolet (EUV) light. An exponential reduction of the density of the plasma from ∼10^{18}-10^{17}e^{-} cm^{-3} is observed in this same time window. Our work is relevant for understanding the dynamics of the decaying, expanding plasma in state-of-the-art EUV nanolithography machines.
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