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High fill factor microlens array fabrication using direct laser writing and its application in wavefront detection.

Yi Huang, Yanliang Qin, Pu Tu

|August 16, 2020

Summary

We developed 100% fill factor microlens arrays (MLAs) using femtosecond laser direct writing. These MLAs function as efficient Shack-Hartmann wavefront sensors, accurately detecting complex beam wavefronts.

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Area of Science:

Optics and Photonics
Laser Fabrication
Wavefront Sensing

Background:

Microlens arrays (MLAs) are crucial optical components.
Femtosecond laser direct writing offers high precision fabrication.
Shack-Hartmann wavefront sensing requires efficient optical elements.

Purpose of the Study:

To fabricate 100% fill factor MLAs using femtosecond laser direct writing.
To evaluate the focusing efficiency of the fabricated MLAs.
To demonstrate the MLAs' application as Shack-Hartmann wavefront sensors.

Main Methods:

Femtosecond laser direct writing was employed for MLA fabrication.
The MLA design features periodical hexagonal plano-convex microlens units (9 µm diameter).
Focusing efficiency was measured, and MLA performance was tested with a CCD camera.

Main Results:

Fabrication achieved 100% fill factor MLAs.
Individual microlens focusing efficiency reached 92%.
The MLA successfully detected wavefronts of oblique incident plane beams and vortex beams.

Conclusions:

Femtosecond laser direct writing is suitable for high-efficiency MLA fabrication.
The developed MLAs are effective components for Shack-Hartmann wavefront sensing.
Experimental results align with theoretical predictions, validating the sensor's performance.