Related Experiment Video
Updated: Dec 11, 2025

05:57
Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
8.4K
High resolution, high channel count mid-infrared arrayed waveguide gratings in silicon
Optics Letters
|August 16, 2020
Summary
Silicon-on-insulator arrayed waveguide gratings (AWGs) operating at 4.7 µm demonstrate promising performance. These devices exhibit low crosstalk and insertion loss, making them suitable for various optical applications.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
Background:
- Arrayed waveguide gratings (AWGs) are crucial components in wavelength division multiplexing systems.
- Silicon-on-insulator (SOI) technology offers advantages for integrated photonic devices due to its high refractive index contrast and CMOS compatibility.
Purpose of the Study:
- To demonstrate the fabrication and performance of AWGs operating in the mid-infrared (4.7 µm) wavelength range using SOI.
- To evaluate the impact of different channel spacings and device configurations on AWG performance, including crosstalk and insertion loss.
Main Methods:
- Fabrication of AWGs on SOI waveguides with specific silicon and buried oxide layer thicknesses.
- Characterization of multi-channel AWGs with varying channel counts and spacings (50 GHz, 87 GHz, 100 GHz, 170 GHz, 200 GHz).
- Measurement of key performance metrics such as crosstalk, insertion loss, channel peak difference, and thermal drift.
Main Results:
- Demonstrated AWGs with crosstalk levels as low as -32.31 dB and insertion losses of -1.43 dB for eight-channel devices.
- Achieved low crosstalk (-21.67 dB and -24.30 dB) and insertion loss (-4.2 dB and -3.8 dB) for 14- and 16-channel devices, respectively.
- Observed a channel peak difference of 9.3 nm for designed AWGs and a transmission spectrum shift of 0.22 nm/°C with temperature variation.
Conclusions:
- The developed SOI-based AWGs operating at 4.7 µm show excellent performance characteristics suitable for mid-infrared photonic applications.
- The results highlight the potential of SOI technology for realizing complex integrated photonic devices in this spectral region.
- The demonstrated thermal stability and precise channel spacing control are critical for practical device implementation.

