Updated: Dec 11, 2025

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
Tomoki Iwama1, Kumi Y Inoue, Hiroya Abe
1Graduate School of Environmental Studies, Tohoku University, Sendai, Miyagi, Japan. kumi.inoue.b3@tohoku.ac.jp hitoshi.shiku.c3@tohoku.ac.jp.
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