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Correction: Kang et al. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester. <i>Micromachines</i> 2024, <i>15</i>, 581.

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Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy.

Xufeng Liu1, Takuya Takahashi1, Masahiro Konishi2

  • 1Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.

Micromachines
|August 23, 2020
PubMed
Summary
This summary is machine-generated.

This study introduces an advanced addressing technique for microelectromechanical systems (MEMS) micro shutters, enabling precise tri-state positioning for astronomical applications. The developed system allows random access control of shutter arrays, enhancing galactic astronomy observations.

Keywords:
actuatorelectrostaticmulti-object spectroscopyrandom access addressing

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Area of Science:

  • * Microelectromechanical Systems (MEMS) Engineering
  • * Astrophysics Instrumentation
  • * Advanced Control Systems

Background:

  • * Current astronomical instruments require precise control over light paths.
  • * Microshutters offer a potential solution for multi-object spectroscopy.
  • * Existing addressing techniques for microshutters have limitations in scalability and control.

Purpose of the Study:

  • * To develop an extended cross-bar addressing technique for three-port electrostatic microshutters.
  • * To achieve reliable tri-state positioning (open, rest, close) of microshutters.
  • * To demonstrate random access addressing for microshutter arrays.

Main Methods:

  • * Design and fabrication of a microshutter array with torsion beam suspension.
  • * Utilizing electrostatic pull-in/release hysteresis for tri-state control.
  • * Implementing a control system with MATLAB-coded Arduino electronics for random access.

Main Results:

  • * Successful demonstration of an extended cross-bar addressing technique.
  • * Achieved precise tri-state positioning of individual microshutters.
  • * Validated random access addressing capability for the microshutter array.

Conclusions:

  • * The developed addressing technique is effective for controlling microshutter arrays.
  • * This technology is suitable for sub-clusters in reconfigurable shutter arrays for galactic astronomy.
  • * The system provides a foundation for advanced multi-object astronomical observations.