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FIB/SEM tomography segmentation by optical flow estimation.

Riko Moroni1, Simon Thiele2

  • 1Laboratory for MEMS Applications, IMTEK Department of Microsystems Engineering, University of Freiburg, 79110 Freiburg, Germany.

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|September 8, 2020
PubMed
Summary
This summary is machine-generated.

An optical flow method improves segmentation of mesoporous materials from FIB/SEM tomography by utilizing shine-through artifacts. This technique offers superior accuracy and precision compared to traditional gray-value thresholding for pore space analysis.

Keywords:
Focused ion beamOptical flow estimationPorous materials systemsScanning electron microscopeSegmentationTomography

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Area of Science:

  • Materials Science
  • Imaging and Microscopy
  • Chemical Engineering

Background:

  • Focused ion beam/scanning electron microscopy tomography (FIB/SEM tomography) is crucial for analyzing mesoporous materials in energy applications.
  • Segmentation of pore space and solid material in FIB/SEM tomography is challenging due to shine-through artifacts.
  • Existing segmentation methods, like gray-value thresholding, struggle with these artifacts.

Purpose of the Study:

  • To introduce a novel optical flow-based method for segmenting mesoporous materials in FIB/SEM tomography.
  • To leverage shine-through artifacts to improve segmentation accuracy.
  • To evaluate the performance of the new method against existing techniques.

Main Methods:

  • Development of an optical flow-based algorithm designed to interpret shine-through artifacts.
  • Application of the method to tomographic datasets from a polymer electrolyte fuel cell catalyst layer and a lithium-ion battery composite electrode.
  • Comparison of results with previously performed manual segmentations and gray-value thresholding.

Main Results:

  • The optical flow-based method achieved 86.6% accuracy and 84.0% precision for segmenting a polymer electrolyte fuel cell catalyst layer.
  • The method demonstrated significantly better segmentation results compared to gray-value threshold binarization for both tested datasets.
  • Effective utilization of shine-through artifacts for improved pore space and solid material differentiation.

Conclusions:

  • The optical flow-based method provides a robust and accurate solution for segmenting mesoporous materials in FIB/SEM tomography.
  • This approach overcomes limitations of traditional methods, particularly in the presence of shine-through artifacts.
  • The findings have implications for the characterization of materials in energy storage and conversion devices.