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Error Analysis of a Spherical Capacitive Sensor for the Micro-Clearance Detection in Spherical Joints
Wen Wang1, Wenjun Qiu1, He Yang1
1School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Micromachines
|September 9, 2020
Summary
Manufacturing and installation errors significantly impact spherical capacitive sensor accuracy. Plate shape, ball shape, axial offset, and inclination are key error sources affecting micro-clearance detection in engineering applications.
Area of Science:
- Engineering
- Sensor Technology
- Metrology
Background:
- Spherical joints are crucial in machine tools, robots, and medical devices.
- Accurate micro-clearance detection in these joints is vital for performance and safety.
- Spherical capacitive sensors offer a promising method for such measurements.
Purpose of the Study:
- To analyze errors in spherical capacitive sensors due to manufacturing and installation imperfections.
- To investigate the impact of various error sources on differential capacitance measurements.
- To provide insights for improving sensor design and application.
Main Methods:
- Developed mathematical models to calculate capacitance errors.
- Examined five specific error sources: ball shape, plate shape, axial offset, radial offset, and plate inclination.
- Validated models using Ansoft Maxwell simulations.
Main Results:
- Sensor accuracy is highly sensitive to the shape of the ball and capacitive plates.
- Axial offset and inclined installation of the plate significantly affect measurement accuracy.
- Radial offset of the plate has a minimal impact on the sensor's performance.
Conclusions:
- Manufacturing and installation imperfections are critical factors influencing spherical capacitive sensor accuracy.
- Understanding these error dependencies is essential for reliable micro-clearance detection.
- Design considerations should prioritize minimizing plate/ball shape deviations and axial/inclined offsets.
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