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Updated: Dec 9, 2025
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Published on: August 20, 2007
TiO2 patterning using electro-hydrodynamic lithography
Nicoleta E Voicu1, M S M Saifullah2, K R V Subramanian2
1Department of Physics, Cavendish Laboratory, University of Cambridge, J. J. Thomson Avenue, Cambridge, UKCB3 0HE. www.phy.cam.ac.uk/steiner and The Nanoscience Center, Interdisciplinary Research Collaboration in Nanotechnology, University of Cambridge, 11 J. J. Thomson Avenue, Cambridge, UKCB3 0FF and Department of Polymer Chemistry, University of Groningen, 9747 AG Groningen, The Netherlands.
Abstract:
An increasing number of technologies require the fabrication of micro- and nanostructures over large areas. Soft lithographic methods are gaining in popularity for the manufacture of low-cost micrometre and sub-micrometre structures. Increasingly, these methods developed to structure organic resists can also be used to pattern inorganic materials. Here we introduce a simple lithographic technique that is able to pattern ceramic TiO micro- and nanostructures with high fidelity. Our method makes use of an electrohydrodynamic (EHD) film instability that is controlled by a laterally modulated electric field. A spin-coated film of a stabilized metal alkoxide precursor material was patterned using EHD lithography followed by a heat treatment at 400 °C to yield crystalline TiO micropatterns. Our technique is rather general and can be extended to a number of single- and multicomponent oxide systems.
