Fabrication of Parylene-Coated Microneedle Array Electrode for Wearable ECG Device

Microneedle array electrodes (MNE) showed immense potential for the sensitive monitoring of the bioelectric signals by penetrating the stratum corneum with high electrical impedance. In this paper, we introduce a rigid parylene coated microneedle electrode array and portable electrocardiography (ECG) circuit for monitoring of ECG reducing the motion artifacts. The developed MNE showed stability and durability for dynamic and long-term ECG monitoring in comparison to the typical silver-silver chloride (Ag/AgCl) wet electrodes. The microneedles showed no mechanical failure under the compression force up-to 16 N, but successful penetration of skin tissue with a low insertion force of 5 N. The electrical characteristics of the fabricated MNE were characterized by impedance spectroscopy with equivalent circuit model. The designed wearable wireless ECG monitoring device with MNE proved feasibility of the ECG recording which reduces the noise of movement artifacts during dynamic behaviors.