Prediction of Optimum Process Parameters Fabricated by Direct Laser Interference Patterning Based on Central

Mikhael El-Khoury1, Bogdan Voisiat1, Tim Kunze2

  • 1Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.

Summary

This study optimized direct laser interference patterning for microstructures using design of experiments. The process was refined to improve surface uniformity and minimize pattern errors and waviness.