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Related Experiment Video

Updated: Dec 7, 2025

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes.

Risheng Lv1, Qiang Fu1, Weiping Chen1,2

  • 1MEMS Center, Harbin Institute of Technology, Harbin 150001, China.

Sensors (Basel, Switzerland)
|September 26, 2020
PubMed
Summary

This study presents a digital interface application-specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes, enabling precise spatial angular velocity sensing. The design achieves low bias instability and nonlinearity for improved performance.

Keywords:
MEMS vibratory gyroscopesincremental zoom ADCinertial navigationlow-noise analog front endnonlinear stabilization controltriple-axis digital interface ASIC

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Area of Science:

  • Electrical Engineering
  • Mechanical Engineering
  • Sensor Technology

Background:

  • Micro-electromechanical systems (MEMS) gyroscopes are crucial for inertial navigation and motion sensing.
  • Accurate measurement of spatial angular velocity requires sophisticated signal processing and control.
  • Existing solutions often face challenges in achieving high performance and integration.

Purpose of the Study:

  • To propose a high-performance digital interface application-specific integrated circuit (ASIC) for triple-axis MEMS vibratory gyroscopes.
  • To enable precise measurement of angular velocity in three degrees of freedom (DOF).
  • To improve the stability, accuracy, and integration of MEMS gyroscope systems.

Main Methods:

  • Utilizing time multiplexing for synergetic stable drive control and precise angular velocity measurement.
  • Employing a self-excited digital closed-loop system to drive the proof mass at its resonant frequency for Coriolis force generation.
  • Integrating low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC) for signal conversion.
  • Implementing loop controlling and demodulation modules in digital logic, with automatic amplitude stabilization via peak detection and proportion-integration (PI) control.
  • Incorporating nonlinear digital gain adjustment for rapid resonance establishment and linearity improvement.

Main Results:

  • Achieved a bias instability of 2.1°/h.
  • Demonstrated a nonlinearity of 0.012% over the full-scale range.
  • Successfully manufactured the design using a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology.

Conclusions:

  • The proposed digital interface ASIC offers a high-performance solution for triple-axis MEMS vibratory gyroscopes.
  • The implemented techniques ensure precise and stable angular velocity sensing with improved accuracy.
  • The design represents a significant advancement in integrated MEMS gyroscope technology.