Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: Dec 7, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:46

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

925

On-chip silicon photonics based grating assisted vibration sensor.

Viphretuo Mere, Aneesh Dash, Rakshitha Kallega

    Optics Express
    |September 29, 2020
    PubMed
    Summary

    We developed a compact silicon photonic sensor for precise vibration measurement. This novel sensor achieves high sensitivity, outperforming previous methods for detecting minute displacements.

    Related Concept Videos

    You might also read

    Related Articles

    Articles linked to this work by shared authors, journal, and citation graph.

    Sort by
    Same author

    Revealing biomechanical vulnerabilities in oral cancer cells using 3D coculture platform and low-frequency ultrasound.

    Materials today. Bio·2026
    Same author

    Ultrasound-Generated Nanoscale Mechanical Stimulation to Regulate Stem Cell Differentiation.

    ACS nanoscience Au·2026
    Same author

    Selective killing of cancer-associated fibroblasts by ultrasound-mediated mechanical forces.

    Biomaterials·2025
    Same author

    Confinement Suppresses Mechanical Force-Mediated Cancer Cell Apoptosis.

    Small (Weinheim an der Bergstrasse, Germany)·2025
    Same author

    Nanoscale Ligand Spacing Regulates Mechanical Force-Induced Cancer Cell Killing.

    Nano letters·2025
    Same author

    High-efficiency broadband out-of-plane fiber-to-polymer waveguide grating coupler.

    Optics letters·2024

    Area of Science:

    • Photonics and Nanotechnology
    • Mechanical Engineering and Materials Science
    • Sensor Technology

    Background:

    • Vibration sensing is crucial in various scientific and industrial applications.
    • Existing vibration measurement techniques often lack the required sensitivity, scalability, or on-chip integration.
    • Photonic-based sensors offer potential for high-resolution measurements but require further development for practical applications.

    Purpose of the Study:

    • To present a compact, highly sensitive, and scalable on-chip photonic vibration measurement scheme.
    • To demonstrate the performance of a silicon photonic diffraction-grating sensor integrated with a silicon cantilever.
    • To optimize the sensor design for maximum displacement sensitivity using advanced simulations.

    Main Methods:

    More Related Videos

    Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
    12:19

    Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

    Published on: April 4, 2017

    8.7K
    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
    09:03

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

    Published on: January 7, 2019

    7.5K

    Related Experiment Videos

    Last Updated: Dec 7, 2025

    Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
    09:46

    Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

    Published on: August 8, 2025

    925
    Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
    12:19

    Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

    Published on: April 4, 2017

    8.7K
    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response
    09:03

    A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

    Published on: January 7, 2019

    7.5K
  • Integration of a silicon photonic diffraction-grating sensor beneath a silicon cantilever.
  • Demonstration of static and dynamic displacement measurements.
  • Validation of sensor performance against a commercial Laser Doppler Vibrometer (LDV).
  • Utilized 2D-Finite-Difference Time-Domain (FDTD) simulations for sensor optimization.

    • Main Results:

    • Achieved a static and dynamic measurement sensitivity of 0.6% change in intensity per nm displacement.
    • Demonstrated excellent agreement between the grating-based sensor and LDV for electrostatically driven dynamic response.
    • Measured a minimum displacement of 1.9 picometers (pm) with a displacement sensitivity of 10 μW/nm at a 16 Hz bandwidth.
    • The demonstrated sensitivity is two orders of magnitude better than static displacement measurements.

    Conclusions:

    • The proposed on-chip photonic vibration measurement scheme is compact, highly sensitive, and scalable.
    • The silicon photonic diffraction-grating sensor shows excellent performance, validated by LDV measurements.
    • This technology offers a significant advancement in vibration sensing, enabling detection of extremely small displacements.