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Viphretuo Mere, Aneesh Dash, Rakshitha Kallega

|September 29, 2020

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We developed a compact silicon photonic sensor for precise vibration measurement. This novel sensor achieves high sensitivity, outperforming previous methods for detecting minute displacements.

Area of Science:

Photonics and Nanotechnology
Mechanical Engineering and Materials Science
Sensor Technology

Background:

Vibration sensing is crucial in various scientific and industrial applications.
Existing vibration measurement techniques often lack the required sensitivity, scalability, or on-chip integration.
Photonic-based sensors offer potential for high-resolution measurements but require further development for practical applications.

Purpose of the Study:

To present a compact, highly sensitive, and scalable on-chip photonic vibration measurement scheme.
To demonstrate the performance of a silicon photonic diffraction-grating sensor integrated with a silicon cantilever.
To optimize the sensor design for maximum displacement sensitivity using advanced simulations.

Main Methods:

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Integration of a silicon photonic diffraction-grating sensor beneath a silicon cantilever.

Demonstration of static and dynamic displacement measurements.

Validation of sensor performance against a commercial Laser Doppler Vibrometer (LDV).

Utilized 2D-Finite-Difference Time-Domain (FDTD) simulations for sensor optimization.

Main Results:

Achieved a static and dynamic measurement sensitivity of 0.6% change in intensity per nm displacement.
Demonstrated excellent agreement between the grating-based sensor and LDV for electrostatically driven dynamic response.
Measured a minimum displacement of 1.9 picometers (pm) with a displacement sensitivity of 10 μW/nm at a 16 Hz bandwidth.
The demonstrated sensitivity is two orders of magnitude better than static displacement measurements.

Conclusions:

The proposed on-chip photonic vibration measurement scheme is compact, highly sensitive, and scalable.
The silicon photonic diffraction-grating sensor shows excellent performance, validated by LDV measurements.
This technology offers a significant advancement in vibration sensing, enabling detection of extremely small displacements.