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Related Experiment Video

Updated: Dec 7, 2025

Fabrication and Testing of Microfluidic Optomechanical Oscillators
09:10

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Published on: May 29, 2014

12.5K

Monolithically integrated membrane-in-the-middle cavity optomechanical systems.

G J Hornig, S Al-Sumaidae, J Maldaner

    Optics Express
    |September 29, 2020
    PubMed
    Summary

    We developed novel curved-mirror Fabry-Perot cavities with silicon nitride membranes for enhanced sensing and quantum information applications. These microcavities offer high finesse and large optomechanical coupling for advanced optical and quantum technologies.

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    Area of Science:

    • Optics and Photonics
    • Micro-electromechanical Systems (MEMS)

    Background:

    • Fabry-Perot cavities are crucial optical resonators.
    • Integrating MEMS with optical cavities presents fabrication challenges.

    Purpose of the Study:

    • To develop and characterize novel curved-mirror Fabry-Perot cavities with embedded silicon nitride membranes.
    • To investigate the optomechanical properties of these microcavities for sensing and quantum information applications.

    Main Methods:

    • Monolithic surface-micromachining fabrication process.
    • Confocal microscopy for membrane presence confirmation.
    • Optical studies and thermomechanical calibration for property verification.

    Main Results:

    • Successfully fabricated curved-mirror Fabry-Perot cavities with suspended silicon nitride membranes.

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  • Achieved reflectance-limited finesse (F ~ 10^3) and wavelength-scale mode volumes (VM ~ 10λ^3).
  • Demonstrated large optomechanical coupling due to short cavity length (L ~ 2λ).

    • Conclusions:

    • The developed microcavities are suitable for advanced optical sensing and quantum information processing.
    • The monolithic fabrication approach enables scalable production of these optomechanical devices.
    • The demonstrated large optomechanical coupling is a key enabler for future quantum technologies.