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Toxic gases used in the microelectronics industry.

P H Wald, C E Becker

    Occupational Medicine (Philadelphia, Pa.)
    |January 1, 1986
    PubMed
    Summary

    Hazardous gases in semiconductor manufacturing pose significant risks during storage, handling, and disposal. Understanding flammability, corrosiveness, and health effects is crucial for worker and community safety.

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    Area of Science:

    • Chemical Safety
    • Industrial Hygiene
    • Environmental Health

    Background:

    • Toxic gases are integral to semiconductor and related device manufacturing processes.
    • The storage, handling, and disposal of these hazardous materials present substantial risks.
    • Potential exposure incidents include accidents, terrorism, and natural disasters.

    Purpose of the Study:

    • To highlight the dangers associated with toxic gases in high-technology manufacturing.
    • To emphasize the need for comprehensive safety protocols.
    • To inform risk assessment and mitigation strategies.

    Main Methods:

    • Review of toxic gas properties (flammability, corrosiveness, concentration).
    • Analysis of potential exposure scenarios.
    • Examination of known human health effects.

    Main Results:

    • Toxic gases present immediate dangers to life and health.
    • Flammability, corrosiveness, and concentration are key risk factors.
    • Worker and community safety are paramount concerns.

    Conclusions:

    • Robust safety measures are essential for managing toxic gases in semiconductor facilities.
    • Proactive risk management must consider diverse exposure pathways.
    • Protecting human health and the environment requires diligent attention to gas hazards.

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