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Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler.

Qifeng Qiao, Mahmut Sami Yazici, Bowei Dong

    Optics Letters
    |October 1, 2020
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    Summary
    This summary is machine-generated.

    We developed a versatile mid-infrared photonic switch on a silicon-on-insulator platform. This micro-electro-mechanical systems (MEMS) device functions as an optical attenuator, switch, and light chopper.

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    Area of Science:

    • Photonics
    • Optical Engineering
    • Materials Science

    Background:

    • Mid-infrared (MIR) photonics is crucial for sensing and communication.
    • Integrated photonic devices require efficient switching and attenuation functionalities.
    • Micro-electro-mechanical systems (MEMS) offer tunable optical components.

    Purpose of the Study:

    • To demonstrate a multifunctional photonic switch on a silicon-on-insulator (SOI) platform.
    • To operate the device in the mid-infrared wavelength range (3.85-4.05 µm).
    • To integrate MEMS technology for tunable optical coupling.

    Main Methods:

    • Utilized suspended waveguides with sub-wavelength cladding.
    • Employed a MEMS tunable waveguide coupler.
    • Leveraged flip-chip bonding for electrostatic actuation.

    Main Results:

    • Achieved an optical attenuator with 25 dB depth using DC voltage.
    • Demonstrated a 1x2 optical switch with 8.9 µs response time and 127 kHz bandwidth using AC voltage.
    • Implemented an on-chip light chopper with performance comparable to commercial devices.

    Conclusions:

    • The proposed SOI-based photonic switch is multifunctional and operates effectively in the MIR range.
    • MEMS integration enables high-performance optical attenuation, switching, and light chopping.
    • This device shows promise for advanced integrated photonic applications in the MIR spectrum.