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Updated: Dec 6, 2025
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
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On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime
Summary
This study demonstrates a new microelectromechanical systems (MEMS) sensor using weakly coupled resonators. This design achieves high sensitivity and common-mode rejection for advanced resonant force and inertial sensing applications.
Area of Science:
- Physics
- Engineering
- Materials Science
Background:
- Weakly coupled resonators offer high sensitivity and common-mode rejection.
- Current sensors use strong coupling, limiting sensitivity for amplitude ratio (AR) metrics.
- Mode-localized sensors typically avoid modal overlap.
Purpose of the Study:
- To demonstrate the operation of weakly coupled resonators in the weak-coupling regime.
- To develop a microelectromechanical systems (MEMS) sensor for stiffness shift detection.
- To explore the linear dynamic range of amplitude ratio (AR) readout sensors.
Main Methods:
- Theoretical analysis of weakly coupled resonators.
- Experimental validation using a prototype microelectromechanical systems (MEMS) sensor.
- Investigation of stiffness shift detection and noise floor.
Main Results:
- Demonstrated operation in the weak-coupling (modal overlap) regime.
- Achieved a stiffness bias instability of [Formula: see text]/m (9.5 ppb).
- Measured a noise floor of [Formula: see text]/m/ √ Hz (6.8 ppb/ √ Hz).
Conclusions:
- The proposed method enables high-performance resonant force and inertial sensors.
- Weak coupling overcomes sensitivity limitations of strong coupling in mode-localized sensors.
- Linear dynamic range is determined by the secondary resonator's dynamic range.
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