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Updated: Dec 6, 2025
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
Published on: February 27, 2013
Semi-transparent quaternary oxynitride photoanodes on GaN underlayers
Zili Ma1, Karolina Piętak, Jędrzej Piątek
1Institute of Inorganic Chemistry, RWTH Aachen University, 52056 Aachen, Germany.
Abstract:
Conformal atomic layer deposition (ALD) technique is employed to make semi-transparent TaOxNy, providing the possibility to build semi-transparent oxy(nitride) heterojunction photoanodes on conductive substrates. A generalized approach was developed to manufacture semi-transparent quaternary metal oxynitrides on conductive substrates beyond semi-transparent binary Ta3N5 photoanodes aiming for wireless tandem photoelectrochemical (PEC) cells.
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