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Updated: Dec 6, 2025

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy
Published on: April 21, 2022
Meniscus-controlled printing of single-crystal interfaces showing extremely sharp switching transistor operation
Gyo Kitahara1, Satoru Inoue2, Toshiki Higashino3
1Department of Applied Physics, The University of Tokyo, Tokyo 113-8656, Japan. kitahara@hsgw.t.u-tokyo.ac.jp t-hasegawa@ap.t.u-tokyo.ac.jp.
Abstract:
Meniscus, a curvature of droplet surface around solids, takes critical roles in solution-based thin-film processing. Extension of meniscus shape, and eventual uniform film growth, is strictly limited on highly lyophobic surfaces, although such surface should considerably improve switching characteristics. Here, we demonstrate a technique to control the solution meniscus, allowing to manufacture single-crystalline organic semiconductor (OSC) films on the highest lyophobic amorphous perfluoropolymer, Cytop. We used U-shaped metal film pattern produced on the Cytop surface, to initiate OSC film growth and to keep the meniscus extended on the Cytop surface. The growing edge of the OSC film helped maintain the meniscus extension, leading to a successive film growth. This technique facilitates extremely sharp switching transistors with a subthreshold swing of 63 mV dec-1 owing to the effective elimination of charge traps at the semiconductor/dielectric interface. The technique should expand the capability of print production of functional films and devices.
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