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Chemistry of ruthenium as an electrode for metal-insulator-metal capacitor application

Eui Young Jung1, Jeongil Bang2, Ji Hyeon Hwang1,3

  • 1Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 17104, Republic of Korea.

Nanotechnology
|October 8, 2020
PubMed

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