Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining

Area of Science:

• Materials Science and Engineering
• Manufacturing Technology

Background:

• Traditional micro-fabrication methods face limitations with difficult-to-machine materials.
• Existing techniques may require expensive tooling or lack flexibility for complex designs.

Purpose of the Study:

• To introduce and evaluate a novel hybrid micro-fabrication process: mask electrolyte jet machining (MEJM).
• To demonstrate the capability of MEJM for creating complex surficial micro-features with high accuracy and repeatability.

Main Methods:

• Developed a hybrid process combining principles of lithography and Jet-Electrochemical Machining (Jet-ECM).
• Utilized statistical analysis and multivariate kernel density estimation (KDE) to assess process performance.
• Fabricated micro-letters as complex surficial structures to showcase the technology's versatility.

Main Results:

• Achieved high repeatability with a minimum standard deviation of shape error ratio at 0.297%.
• Demonstrated high shape accuracy with a minimum shape error of 0.039%.
• Successfully fabricated intricate microstructures, including intersecting straight and curved grooves.

Conclusions:

• MEJM is a promising non-contact machining technology for fabricating microstructures on difficult-to-machine materials.
• The process offers a flexible, tool-less approach suitable for batch manufacturing of surface micro-features.
• MEJM shows potential for high-productivity applications requiring precise micro-feature replication.