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Dual subaperture stitching for large flat mirror testing.

Goeun Kim, In-Ung Song, June Gyu Park

    Applied Optics
    |October 26, 2020
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces a dual subaperture stitching (DSS) method for testing large flat mirrors. This novel technique uses a smaller reference sphere, reducing cost and time for fabricating large optics.

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    Area of Science:

    • Optical metrology
    • Precision engineering

    Background:

    • The Ritchey-Common test is standard for flat mirror testing but requires large, costly reference spheres.
    • Fabricating large reference spheres for testing large flat optics is time-consuming and expensive.

    Purpose of the Study:

    • To develop a novel, cost-effective technique for testing large flat mirrors using smaller reference spheres.
    • To introduce a dual subaperture stitching (DSS) method for enhanced optical metrology.

    Main Methods:

    • A modified Ritchey-Common test with a smaller reference sphere was combined with centerline scanning.
    • The flat mirror was rotated in fixed angular steps to enable stitching and identify reference sphere errors.
    • Dual subaperture stitching (DSS) was employed to overcome limitations of traditional testing methods.

    Main Results:

    • The DSS method achieved a root-mean-square (rms) measurement error of 0.2 nm on a 152 mm flat mirror, comparable to full-aperture interferometry.
    • A 1.2 m flat mirror was successfully tested using an 0.8 m reference sphere, measuring a surface form error (SFE) of 11.9±0.5 nm rms.

    Conclusions:

    • The dual subaperture stitching (DSS) method offers a viable and accurate alternative for testing large flat mirrors.
    • This technique significantly reduces the cost and complexity associated with fabricating large reference optics.