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Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional
Optics Express
|October 29, 2020
Summary
This study presents a highly sensitive silicon photonic temperature sensor using a nano-slot waveguide and liquid crystal (LC). The device achieves record-breaking sensitivity for silicon-on-insulator (SOI) platform sensors.
Area of Science:
- Photonics
- Materials Science
- Sensor Technology
Background:
- Silicon photonic devices are crucial for integrated sensing applications.
- Liquid crystals (LCs) offer tunable optical properties for enhanced sensor performance.
- High-sensitivity temperature sensors are vital for various scientific and industrial fields.
Purpose of the Study:
- To propose and demonstrate a highly sensitive silicon photonic temperature sensor.
- To leverage the strong light-matter interaction in a nano-slot waveguide cladded with nematic liquid crystal (LC).
- To achieve unprecedented temperature sensitivity on a silicon-on-insulator (SOI) platform.
Main Methods:
- Fabrication of a two-mode nano-slot waveguide device on an SOI platform.
- Cladding the waveguide with a nematic liquid crystal (LC), specifically E7.
- Characterization via measurement of optical transmission spectra at varying ambient temperatures.
Main Results:
- Demonstrated high temperature sensitivities of 0.810 nm/°C (room temperature) and 1.619 nm/°C (near 50°C).
- Experimental results closely matched theoretical simulation predictions.
- Achieved the highest experimentally demonstrated temperature sensitivity for silicon-waveguide sensors on SOI.
Conclusions:
- The developed silicon photonic sensor offers exceptional temperature sensitivity.
- The nano-slot waveguide directional coupler design enables submicron spatial resolution and material flexibility.
- This technology is suitable for applications requiring tailored temperature sensitivity and operational ranges.

