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Updated: Dec 3, 2025

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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Summary
Researchers developed a new method to create tellurite microbubble whispering gallery resonators (WGRs) using a CO2 laser. These microbubbles show high quality factors and potential for sensing and tunable lasers.
Area of Science:
- Photonics and optical materials science
- Micro- and nanofabrication technologies
- Glass science and engineering
Background:
- Whispering gallery resonators (WGRs) are crucial for various photonic applications.
- Soft glasses, like tellurite, offer unique thermo-optical and optomechanical properties.
- Fabricating microscale WGRs with high quality factors from soft glasses presents challenges.
Purpose of the Study:
- To develop a novel method for fabricating microbubble whispering gallery resonators (WGRs) from tellurite glass.
- To investigate the optical characteristics and sensitivities of tellurite microbubble WGRs to temperature and air pressure.
- To demonstrate lasing capabilities and explore potential applications in sensing and integrated photonics.
Main Methods:
- Utilized a CO2 laser for precise fabrication of microbubble WGRs from tellurite glass.
- Characterized passive and active (Yb3+-Er3+ co-doped) tellurite microbubbles.
- Measured optical properties, including quality factors, temperature sensitivity, and air pressure sensitivity.
- Analyzed microbubble morphology using electron microscopy and optical spectra.
Main Results:
- Achieved loaded quality factors as high as 2.3 × 10^6.
- Measured temperature sensitivity of 4.9 GHz/K and air pressure sensitivity of 7.1 GHz/bar for passive microbubbles.
- Demonstrated C-band single-mode lasing in active microbubbles with a low threshold of 1.66 mW.
- Observed a laser output frequency sensitivity to pressure changes of 6.5 GHz/bar.
- Fabricated microbubbles exhibited low eccentricity and uniform wall thickness.
Conclusions:
- The CO2 laser fabrication method enables high-quality microbubble WGRs from low-melting-point soft glasses.
- Tellurite microbubbles possess excellent optical properties and high sensitivities, making them suitable for sensing applications.
- Active tellurite microbubbles can function as tunable microcavity lasers.
- These microbubbles hold significant potential for integrated photonics, nonlinear optics, and advanced sensing platforms.

