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Fabrication of Silica Ultra High Quality Factor Microresonators
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A tellurite glass optical microbubble resonator.

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    Summary

    Researchers developed a new method to create tellurite microbubble whispering gallery resonators (WGRs) using a CO2 laser. These microbubbles show high quality factors and potential for sensing and tunable lasers.

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    Area of Science:

    • Photonics and optical materials science
    • Micro- and nanofabrication technologies
    • Glass science and engineering

    Background:

    • Whispering gallery resonators (WGRs) are crucial for various photonic applications.
    • Soft glasses, like tellurite, offer unique thermo-optical and optomechanical properties.
    • Fabricating microscale WGRs with high quality factors from soft glasses presents challenges.

    Purpose of the Study:

    • To develop a novel method for fabricating microbubble whispering gallery resonators (WGRs) from tellurite glass.
    • To investigate the optical characteristics and sensitivities of tellurite microbubble WGRs to temperature and air pressure.
    • To demonstrate lasing capabilities and explore potential applications in sensing and integrated photonics.

    Main Methods:

    • Utilized a CO2 laser for precise fabrication of microbubble WGRs from tellurite glass.
    • Characterized passive and active (Yb3+-Er3+ co-doped) tellurite microbubbles.
    • Measured optical properties, including quality factors, temperature sensitivity, and air pressure sensitivity.
    • Analyzed microbubble morphology using electron microscopy and optical spectra.

    Main Results:

    • Achieved loaded quality factors as high as 2.3 × 10^6.
    • Measured temperature sensitivity of 4.9 GHz/K and air pressure sensitivity of 7.1 GHz/bar for passive microbubbles.
    • Demonstrated C-band single-mode lasing in active microbubbles with a low threshold of 1.66 mW.
    • Observed a laser output frequency sensitivity to pressure changes of 6.5 GHz/bar.
    • Fabricated microbubbles exhibited low eccentricity and uniform wall thickness.

    Conclusions:

    • The CO2 laser fabrication method enables high-quality microbubble WGRs from low-melting-point soft glasses.
    • Tellurite microbubbles possess excellent optical properties and high sensitivities, making them suitable for sensing applications.
    • Active tellurite microbubbles can function as tunable microcavity lasers.
    • These microbubbles hold significant potential for integrated photonics, nonlinear optics, and advanced sensing platforms.