Simulation and experimental study of laser-induced thermal deformation of spectral beam combination grating

The multilayer dielectric (MLD) grating is a critical device for combining multiple laser beams into a single beam in a spectral beam combining (SBC) system. We established a theoretical thermal deformation model of the laser-irradiated MLD grating. Thermal deformation on the surface of the grating is simulated according to a series of parameters including the laser irradiation time, laser power density, and substrate size. To verify the model, we exposed a 960 l/mm, 50×50×1.5 mm³ grating to a laser power density of 3.61 kW/cm² and observed the temperature change. We used a Twyman-Green interferometer to measure the interference fringes on the grating surface. Based on the Fourier-transform method and a Zernike polynomial fitting method, the real-time grating surface profile is reconstructed. The results show that substrate thickness increase or area decrease can reduce thermal deformation, the average decreases are 18.3% and 19.9%, respectively. The discussion and analysis of the grating thermal deformation are potentially valuable for designing grating to decrease the thermal deformation and improve the combined beam quality of a SBC system.