Design optimization of a 6.4 mm-diameter electromagnetic 2D scanning micromirror.

Area of Science:

• MEMS (Micro-Electro-Mechanical Systems)
• Optoelectronics
• Electromagnetics

Background:

• Biaxial scanning micromirrors are crucial components in various optical systems.
• Optimizing electromagnetic actuation is key to achieving large scan angles and high performance.
• Minimizing crosstalk is essential for precise control in scanning applications.

Purpose of the Study:

• To design, optimize, fabricate, and analyze a novel electromagnetic biaxial scanning micromirror.
• To maximize driving torque through lumped element model and magnetic circuit optimization.
• To investigate and propose solutions for reducing actuation crosstalk.

Main Methods:

• Design optimization of a 6.4 mm-diameter micromirror with concentric gimbals and single-turn coils.
• Utilizing a cylindrical permanent magnet assembly for radial magnetic field actuation.
• Fabrication and experimental actuation at 300 Hz and 1,010 Hz.

Main Results:

• Achieved maximum optical scan angles of 25.6° (vertical) and 35.3° (horizontal).
• Demonstrated successful actuation at 300 Hz and 1,010 Hz.
• Analyzed actuation crosstalk and proposed improved models for reduction.

Conclusions:

• The optimized electromagnetic biaxial scanning micromirror exhibits high performance in terms of scan angle.
• The proposed design and optimization strategies are effective for enhancing micromirror performance.
• Further improvements in crosstalk reduction are identified for future development.