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Displacement-free stereoscopic phase measuring deflectometry based on phase difference minimization.

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    This study introduces a novel algorithm for precise specular surface shape measurement using stereoscopic phase measuring deflectometry (PMD). The system resolves height-normal ambiguity without component movement, enabling simultaneous surface normal and absolute height determination.

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    Area of Science:

    • Optical Metrology
    • Surface Metrology
    • Computer Vision

    Background:

    • Phase Measuring Deflectometry (PMD) systems often face height-normal ambiguity.
    • Existing PMD systems may require component movement to resolve ambiguities.
    • Accurate specular surface characterization is crucial in various optical applications.

    Purpose of the Study:

    • To propose a displacement-free stereoscopic PMD system for specular surface shape measurement.
    • To develop a phase difference minimization algorithm to overcome height-normal ambiguity.
    • To simultaneously obtain surface normal and absolute height without system reconfiguration.

    Main Methods:

    • A stereoscopic phase measuring deflectometry (PMD) system was designed.
    • A phase difference minimization algorithm using second-order polynomial fitting was implemented.
    • Surface reconstruction utilized bi-cubic sub-pixel interpolation and 2D Fourier integration.

    Main Results:

    • The proposed system successfully measured specular surface shapes without displacement.
    • Height-normal ambiguity inherent in PMD was resolved.
    • Simultaneous acquisition of surface normal and absolute height was achieved.

    Conclusions:

    • The developed phase difference minimization algorithm effectively measures specular surface shape in a displacement-free stereoscopic PMD system.
    • The system demonstrates robust performance and repeatability for surface metrology applications.
    • This method offers a significant advancement for non-contact, high-accuracy surface inspection.