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Large-area Scanning Probe Nanolithography Facilitated by Automated Alignment and Its Application to Substrate Fabrication for Cell Culture Studies

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Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing.

John McPhillimy^1,2, Dimitars Jevtics¹, Benoit J E Guilhabert¹

¹Institute of Photonics, SUPA Department of Physics, University of Strathclyde, Glasgow, United Kingdom.

ACS Applied Nano Materials

|November 2, 2020

Summary

Automated nanoscale transfer printing enables scalable manufacturing of integrated chip systems. This process achieves high positional and rotational accuracy for micro- and nanoscale devices, crucial for telecommunications and quantum computing applications.

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Area of Science:

Nanotechnology
Materials Science
Electrical Engineering

Background:

Heterogeneous integration of micro/nanoscale devices with on-chip circuits is vital for advanced applications like telecommunications, quantum information processing, and sensing.
Previous nanoscale pick-and-place integration methods lacked automation, hindering scalability for multielement systems and high-throughput manufacturing.

Purpose of the Study:

To develop an automated transfer printing process for nanoscale integration that maintains high accuracy.
To demonstrate the feasibility of automated, high-precision placement of micro- and nanoscale devices for scalable manufacturing.

Main Methods:

An automated transfer printing system was developed using optical microscopy, computer vision, and a high-accuracy translational stage.
Cross-correlation image processing was employed for automatic alignment and precise device placement.
The process was tested for both serial and parallel transfer of thin film silicon membranes and single nanowires.

Main Results:

Serial device integration achieved an average positional offset of <40 nm (3σ < 390 nm).
Parallel transfer across a 2x2 mm^2 area demonstrated an average offset of <30 nm (3σ < 705 nm).
Rotational accuracy better than 45 mrad was consistently achieved for various device types.

Conclusions:

The automated transfer printing method successfully integrates micro- and nanoscale devices with high accuracy and automation.
This technology enables scalable manufacturing of complex heterogeneously integrated chip systems.
The demonstrated process is compatible with devices from both defined and random distributions, paving the way for industrial adoption.