Formation of the Submicron Oxidative LIPSS on Thin Titanium Films During Nanosecond Laser Recording

Laser-induced periodic surface structures (LIPSSs) spontaneously appearing on the laser-treated (melted or evaporated) surfaces of bulk solid materials seem to be a well-studied phenomenon. Peculiarities of oxidative mechanisms of LIPSS formation on thin films though are far less clear. In this work, the appearance of oxidative LIPSSs on thin titanium films was demonstrated under the action of commercially available nanosecond-pulsed Yb-fiber laser. The temperature and energy regimes favoring their formation were revealed, and their geometric characteristics were determined. The period of these LIPSSs was found to be about 0.7 λ, while the modulation depth varied between 70 and 110 nm, with high stability and reproducibility. It was shown that LIPSS orientation is rather easily manageable in the regimes of our interest, which could provide a way of controlling their properties.