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Updated: Dec 2, 2025

Thermal Measurement Techniques in Analytical Microfluidic Devices

Thermal Measurement Techniques in Analytical Microfluidic Devices

Published on: June 3, 2015

A microfluidic flow meter with micromachined thermal sensing elements.

Pu-Jun Zhao¹, Rong Gan¹, Liji Huang²

¹National Institute of Measurement and Testing Technology, Chengdu 610021, China.

The Review of Scientific Instruments

|November 3, 2020

Summary

This summary is machine-generated.

This study presents a novel microfluidic flow meter using a MEMS thermal time-of-flight chip. This device accurately measures mass flow rate and fluid properties, advancing thermal flow sensing technology.

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Area of Science:

Microfluidics
MEMS Technology
Thermal Sensing

Background:

Traditional thermal flow meters primarily measure calorimetric mass flow rates.
There is a need for microfluidic devices capable of measuring both flow rate and fluid properties.

Purpose of the Study:

To design, fabricate, and evaluate a microfluidic flow meter based on a MEMS thermal time-of-flight sensing chip.
To demonstrate the capability of measuring both mass flow rate and flow media properties.

Main Methods:

Utilizing a micromachined (MEMS) silicon substrate with integrated thermistors and a microheater.
Employing thermal excitation with a modulated power source and analyzing heat transfer responses (time differences and amplitudes).

Main Results:

The microfluidic flow meter successfully measures mass flow rate.
The device also determines flow media properties, demonstrated with water and isopropyl alcohol.

Conclusions:

The developed MEMS thermal time-of-flight flow meter offers enhanced functionality beyond traditional calorimetric methods.
This novel device presents a significant advancement in microfluidic flow measurement and fluid characterization.