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There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...
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Spectrally resolved polarizing interferometer for single-shot line profiling.

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    This study introduces a spectrally resolved polarizing interferometer that overcomes the dead zone limitation of Fourier methods. The new design enables single-image line profile acquisition and doubles the measurement range for enhanced optical metrology.

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Surface Profiling

    Background:

    • Traditional Fourier-based spectrally resolved interferometers suffer from a dead zone due to minimum measurable range limitations.
    • Existing methods often require multiple measurements or complex processing for accurate surface profiling.

    Purpose of the Study:

    • To develop a modified spectrally resolved interferometer that eliminates the dead zone and enhances measurement capabilities.
    • To enable rapid, single-image acquisition of specimen line profiles.
    • To extend the measurable range compared to conventional techniques.

    Main Methods:

    • A spectrally resolved polarizing interferometer was designed and implemented.
    • A polarization pixelated CMOS camera was utilized to capture spatially phase-shifted spectral interferograms.
    • Phase-shifting techniques were employed for spectral phase extraction from a single image.
    • Lateral scanning was performed for 3D surface profiling.

    Main Results:

    • The proposed interferometer successfully obtained a line profile of a specimen in a single image.
    • The measurement range was extended to 104 µm, effectively doubling the typical range.
    • The system demonstrated capability for 3D surface profiling when combined with lateral scanning.

    Conclusions:

    • The spectrally resolved polarizing interferometer effectively overcomes dead zone limitations and enhances measurement range.
    • Single-image acquisition of line profiles and extended measurement range are key advantages.
    • The developed system offers a promising alternative for precise optical metrology and surface characterization.