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Advanced RuO₂ Thin Films for pH Sensing Application.

Xinyue Yao¹, Mikko Vepsäläinen², Fabio Isa³

¹School of Materials Science and Engineering, University of New South Wales, Kensington, NSW 2052, Australia.

Sensors (Basel, Switzerland)

|November 14, 2020

Summary

Ruthenium dioxide (RuO2) thin films were optimized for pH sensing. DC sputtering from an oxide cathode yielded superior pH sensitivity and film properties compared to RF sputtering.

Keywords:

magnetron sputtering conditions pH performance ruthenium dioxide thin film characterisation

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Area of Science:

Materials Science
Electrochemistry
Thin Film Technology

Background:

Ruthenium dioxide (RuO2) is a promising material for electrochemical sensors.
Optimizing thin film deposition is crucial for enhancing sensor performance.

Purpose of the Study:

To investigate the effect of magnetron sputtering parameters on RuO2 thin film properties.
To determine the optimal conditions for achieving high pH sensitivity in RuO2 thin films.

Main Methods:

Magnetron sputtering (DC and RF) with varying deposition conditions.
Characterization of surface morphology, composition, crystal structure, and mechanical properties.
Evaluation of pH performance and sensitivity.

Main Results:

DC sputtered RuO2 films from an oxide cathode showed higher pH sensitivity (57.37 mV/pH) with improved surface smoothness, density, and hardness.
RF sputtered films from a metallic cathode had slightly lower sensitivity (56.35 mV/pH) but were rougher, less dense, and softer.
Higher RuO3 phase content in RF sputtered films correlated with better pH response.

Conclusions:

DC sputtering from an oxide cathode offers a superior method for fabricating high-performance RuO2 pH sensors.
Film microstructure and composition significantly influence pH sensing capabilities.
Further research can explore optimizing RuO3 phase content for enhanced sensor design.