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Optimizing Nonrigid Registration for Scanning Transmission Electron Microscopy Image Series.

Chenyu Zhang1, Jie Feng1, Andrew B Yankovich1

  • 1Department of Materials Science and Engineering, University of Wisconsin - Madison, 1509 University Avenue, Madison, WI53706, USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|November 23, 2020
PubMed
Summary

Achieving sub-picometer precision in atomic measurements requires optimizing scanning transmission electron microscope conditions and nonrigid registration (NRR) parameters. Careful alignment and specific dwell times are crucial for high-resolution imaging.

Keywords:
high-angle annular dark-fieldimage processingnonrigid registrationscanning transmission electron microscopy

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Area of Science:

  • Materials Science
  • Microscopy
  • Data Analysis

Background:

  • High-resolution scanning transmission electron microscopy (HRSTEM) enables atomic-scale imaging.
  • Precise atomic column position determination is critical for understanding material properties.
  • Nonrigid registration (NRR) is a technique used to align and average image series.

Purpose of the Study:

  • To determine the experimental and algorithmic conditions necessary for achieving sub-picometer precision in atomic column position measurements using HRSTEM.
  • To investigate the impact of various experimental parameters and NRR settings on measurement precision.

Main Methods:

  • Utilized high-resolution scanning transmission electron microscopy (HRSTEM) on SrTiO3 [100] samples.
  • Applied nonrigid registration (NRR) to a series of HRSTEM images.
  • Optimized experimental parameters including sample tilt, drift, and pixel dwell time.
  • Tuned NRR algorithm parameters, focusing on the smoothness factor.

Main Results:

  • Sub-picometer precision requires sample alignment within 1 mrad tilt and drift below 1 nm/min.
  • For a fixed electron dose, shorter pixel dwell times improved precision in the fast scan direction.
  • Optimal precision in the slow scan direction was achieved at a 6 μs/px dwell time.
  • The NRR algorithm's smoothness factor was identified as the most critical parameter for sub-picometer precision.

Conclusions:

  • Sub-picometer precision in atomic column position measurements via HRSTEM and NRR is achievable with meticulous optimization.
  • Experimental conditions and NRR parameter tuning are both essential for high-precision imaging.
  • The NRR method demonstrates robustness across a broad range of parameters, facilitating its application.