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A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature

Chao Xiang1,2, Yulan Lu1,2, Pengcheng Yan1,2

  • 1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Micromachines
|November 25, 2020
PubMed
Summary

This study introduces a novel resonant pressure microsensor with differential outputs for accurate temperature compensation. The developed microsensor achieves high accuracy, with errors below 0.02% FS across a wide temperature and pressure range.

Keywords:
polynomial fittingresonant pressure microsensorsilicon-on-glass captemperature compensation

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Sensor Technology
  • Materials Science

Background:

  • Resonant microsensors offer high sensitivity but are susceptible to temperature variations.
  • Existing temperature compensation methods often lack accuracy, especially for sensors with turnover points.

Purpose of the Study:

  • To develop and characterize a resonant pressure microsensor with an integrated temperature compensation method.
  • To improve the accuracy and stability of microsensor performance under varying temperatures.

Main Methods:

  • Fabrication of a resonant pressure microsensor using silicon-on-insulator (SOI) wafer with dual resonant beams.
  • Vacuum packaging using silicon-on-glass (SOG) caps and anodic bonding.
  • Implementation of a temperature compensation technique utilizing differential outputs and a temperature sensor with polynomial fitting.

Main Results:

  • The microsensor demonstrated a pressure sensitivity of approximately 0.33 kPa/Hz.
  • The proposed temperature compensation method significantly reduced errors to less than 0.02% FS.
  • Accurate performance was validated over a temperature range of -40 to 85 °C and pressure range of 200 to 2000 kPa.

Conclusions:

  • The developed resonant pressure microsensor with differential output-based temperature compensation offers high accuracy and stability.
  • This approach effectively mitigates temperature-induced errors, making it suitable for demanding applications.
  • The study validates the efficacy of polynomial fitting for enhancing surface fitting accuracy in microsensors.