Related Experiment Video
Updated: Nov 28, 2025

12:38
Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
15.0K
Orthogonal Chemical Functionalization of Au/SiO2/TiW Patterned Substrates
Jian Zhang1, Didier Léonard2, Christelle Yeromonahos1
1Université de Lyon, Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, Ecully cedex 69134, France.
Langmuir : the ACS Journal of Surfaces and Colloids
|December 1, 2020
Summary
Researchers developed a method for precisely functionalizing patterned gold/silicon dioxide/titanium tungsten (Au/SiO2/TiW) substrates. This technique enables selective surface modification, crucial for advanced nanodevices and nanosensors.
Area of Science:
- Materials Science
- Surface Chemistry
- Nanotechnology
Background:
- Multimaterial substrates are essential for advanced nanodevices.
- Achieving selective surface functionalization on patterned multimaterial surfaces remains a challenge.
- Orthogonal functionalization strategies are needed for precise control over surface chemistry.
Purpose of the Study:
- To develop and demonstrate an orthogonal functionalization strategy for macropatterned and micropatterned gold/silicon dioxide/titanium tungsten (Au/SiO2/TiW) substrates.
- To selectively graft different molecules onto specific material areas of the patterned substrates.
- To validate the selectivity and efficiency of the functionalization process.
Main Methods:
- Orthogonal functionalization using monovalent silane, thiol, and phosphonic acid molecules.
- Selective grafting of thiol onto Au, phosphonic acid onto TiW, and silane onto SiO2 areas.
- Characterization of functionalization using X-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (ToF-SIMS), Fourier transform infrared spectroscopy (FTIR), and contact angle measurements.
Main Results:
- Successful orthogonal functionalization of Au/SiO2/TiW patterned substrates was achieved.
- Demonstrated selective grafting of specific molecules onto their intended material surfaces.
- XPS, ToF-SIMS, FTIR, and contact angle measurements confirmed the successful and selective surface modification.
Conclusions:
- The developed orthogonal functionalization method provides precise control over surface chemistry on patterned multimaterial substrates.
- This technique is highly promising for the selective anchoring of various targets, including biomolecules and nanoparticles.
- The approach is valuable for fabricating advanced nanodevices, such as nanosensors and other nanodevices.

