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A Silicon Optical Bench-Based Forward-View Two-Axis Scanner for Microendoscopy Applications.

Dong Zheng1, Dingkang Wang1, Y K Yoon1

  • 1Department of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611, USA.

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This study introduces a novel monolithic optical scanner for microendoscopy. This innovation enables smaller, forward-viewing endoscopic probes for early cancer diagnosis.

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Area of Science:

  • Biomedical Engineering
  • Optical Engineering
  • Materials Science

Background:

  • Microelectromechanical systems (MEMS) scanning mirrors are crucial for in vivo optical microendoscopy.
  • Conventional MEMS endoscopic probes require additional mirrors, increasing probe diameter and limiting access.
  • A compact, forward-viewing scanner is needed to improve diagnostic capabilities for early cancer detection.

Purpose of the Study:

  • To develop a monolithic two-axis forward-view optical scanner using a microelectromechanical system (MEMS) mirror and an integrated beam folding mirror.
  • To reduce the overall diameter of MEMS endoscopic probes for enhanced in vivo imaging.
  • To facilitate earlier cancer diagnosis through improved endoscopic access.

Main Methods:

  • Fabrication of a monolithic scanner integrating an electrothermally driven MEMS mirror and a beam folding mirror on a silicon substrate.
  • Design features parallel mirror plates with a 0.6 mm separation for efficient beam path.
  • Utilized a 45° incidence angle for both mirrors to achieve forward-view scanning.

Main Results:

  • Successful fabrication of the monolithic MEMS optical scanner.
  • Achieved measured optical scan angles of 10.3° (x-axis) and 10.2° (y-axis) at 3 V.
  • Measured tip-tilt resonant frequencies at 1590 Hz (x-axis) and 1850 Hz (y-axis).
  • Enabled the creation of a compact 2.5 mm diameter forward-viewing endoscopic probe.

Conclusions:

  • The developed monolithic MEMS scanner significantly reduces the size of endoscopic probes.
  • This compact design allows for entry into subsegmental bronchi, improving diagnostic potential.
  • The technology holds promise for advancing in vivo diagnosis of early-stage cancers.