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Related Experiment Video

Updated: Nov 27, 2025

Using Laser Scanning Microscopy to Determine Electromigration in Molybdenum Disilicide
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Vertical distance from shading in the SEM.

Peng Gao1, Jie Zhou2, Weibin Rong1

  • 1State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, Heilongjiang 150080, China.

Micron (Oxford, England : 1993)
|December 7, 2020
PubMed
Summary
This summary is machine-generated.

A novel Scanning Electron Microscopy (SEM) microprobe enables precise vertical distance measurements up to 100 nm. This method overcomes traditional limitations by using a semi-transparent epoxy film for real-time feedback during nanomanipulation.

Keywords:
GrayscaleMicroprobeSEMSemi-transparent holeVertical distance measurement

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Microscopy

Background:

  • Scanning Electron Microscopy (SEM) is crucial for sample analysis, 3D reconstruction, and manipulation.
  • Conventional SEM probes obstruct the vertical view, limiting precision in measurements.

Purpose of the Study:

  • To develop a novel SEM microprobe for accurate vertical distance measurement.
  • To overcome limitations of traditional probes in SEM-based manipulation and characterization.

Main Methods:

  • A 3D-printed microprobe with an embedded, semi-transparent epoxy film was developed.
  • The probe's vertical motion was controlled by a nanopositioner and recorded via real-time SEM video.
  • Image processing corrected gray contrast changes from the epoxy film to provide feedback.

Main Results:

  • The gray contrast change correlated with nanopositioner motion, enabling feedback for displacement adjustment.
  • The novel method achieved a resolution of up to 100 nm for vertical distance measurement.
  • This technique facilitates in-situ measurements and nanomanipulations within the SEM.

Conclusions:

  • A simple and effective method for measuring vertical distances in SEM was demonstrated.
  • The developed microprobe enhances precision for in-situ measurements and nanomanipulations.
  • This advancement offers improved capabilities for SEM-based research and applications.