Data relating to mems piezoelectric micro power harvester physical parameter optimization, for extremely low frequency and low vibration level applications

In this paper, the performance of Piezoelectric Micro Power Harvester (PMPH), which converts mechanical vibrations into electrical power via piezoelectric effect is measured based on L18 Orthogonal Array (OA) and Taguchi optimization methods, where 18 experiments are conducted instead of the trial and error approach. Eight control parameters are selected to study the proposed PMPH in the three levels. COMSOL Multiphysics 5.4 simulation software is used to examine all models in frequency and transient response analysis. MINITAB statistical software is used to analyse the simulation data through Taguchi tools and ANOVA test. The control factor, it is found, has more positive bearing on PMPH performance that has the higher delta function in Taguchi, and higher percentage in ANOVA. This method will hopefully reduce time needed in optimizing PMPH and in maintaining the material resources necessary in the fabrication process let alone cost saving [1].