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High-resolution integrated piezoresistive sensors for microfluidic monitoring
Yongxiao Zhou1, Erik M Werner, Eugene Lee
1Department of Biomedical Engineering, University of California, Irvine, CA 92697, USA. mkhine@uci.edu.
Lab on a Chip
|December 10, 2020
Abstract:
Microfluidic devices are traditionally monitored by bulky and expensive off-chip sensors. We have developed a soft piezoresistive sensor capable of measuring micron-level strains that can be easily integrated into devices via soft lithography. We apply this sensor to achieve fast and localized monitoring of pressure, flow, and valve actuation.

