Absence of a Crystal Direction Regime in which Sputtering Corresponds to Amorphous Material

K Schlueter1, K Nordlund2, G Hobler3

  • 1Max-Planck-Institut für Plasmaphysik, Boltzmannstrasse 2, D-85748 Garching, Germany and Fakultät für Maschinenwesen, Technische Universität München, D-85748 Garching, Germany.

Physical Review Letters
|December 14, 2020
PubMed
Summary

Energetic ion sputtering yield in metals varies with crystal direction, differing from amorphous materials. This is due to linear collision sequences, not channeling, impacting material erosion.

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