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Updated: Nov 25, 2025

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
Published on: February 5, 2020
High-efficiency chirped grating couplers on lithium niobate on insulator
Abstract:
High-efficiency chirped grating couplers (GCs) with coupling efficiencies (CE) approaching 90%/coupler were designed by using a particle swarm optimization algorithm. These GCs were fabricated on $z$-cut lithium niobate on insulator (LNOI) with an Au layer on the lithium niobate substrate. The maximum CEs for transverse electric and transverse magnetic polarization input were measured up to ${\sim}{72.0}\%$/coupler and ${\sim}{61.6}\%$/coupler, respectively, which are the state-of-the-art values for LNOI GCs as far as we know. These GCs contribute to the realization of high-efficiency LNOI on-chip integrated optics.

