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Scanning Electron Microscopy01:07

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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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AES is a powerful analytical technique, especially effective when used with plasma sources, producing abundant spectra in characteristic emission lines. The Inductively Coupled Plasma (ICP), in particular, yields superior quantitative analytical data due to its high stability, low noise, low background, and minimal interferences under optimal experimental conditions. However, newer air-operated microwave sources are emerging as promising alternatives that could be more cost-effective than...
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The instrumentation of atomic emission spectrometry (AES) involves various components, including atomization devices that convert samples into gas-phase atoms and ions. There are two main types of atomization devices: continuous and discrete atomizers.  Continuous atomizers, like plasmas and flames, introduce samples in a constant stream, while discrete atomizers inject individual samples using syringes or autosamplers. The most common discrete atomizer is the electrothermal atomizer.
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Quantitative material analysis using secondary electron energy spectromicroscopy.

W Han1, M Zheng1, A Banerjee2

  • 1Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, 117583, Singapore.

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|December 18, 2020
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Summary
This summary is machine-generated.

Secondary electron energy spectroscopy (SEES) in a scanning electron microscope (SEM) can now map atomic number and density of states (DOS) at low voltages. This quantitative analysis offers new applications for SEM and Scanning Auger Microscopy (SAM) instruments.

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Area of Science:

  • Materials Science
  • Surface Science
  • Spectroscopy

Background:

  • Scanning electron microscopy (SEM) is a common tool for surface imaging.
  • Quantitative analysis of material properties at low beam voltages is challenging.
  • Secondary electron (SE) signals in SEM contain rich information about material composition and electronic structure.

Purpose of the Study:

  • To demonstrate the capability of secondary electron energy spectroscopy (SEES) for quantitative material analysis in low voltage SEM (LVSEM).
  • To show SEES can map sample atomic number and determine bulk valence band density of states (DOS).
  • To validate the accuracy and potential applications of SEES in conjunction with SEM and Scanning Auger Microscopy (SAM).

Main Methods:

  • Utilized an electron energy analyzer attached to a SEM.
  • Detected subtle spectral shape changes in scattered secondary electron (SE) signals.
  • Extracted fine structure features from SE spectra to derive material properties.

Main Results:

  • Achieved accurate mapping of sample atomic number.
  • Successfully acquired bulk valence band density of states (DOS) information.
  • Demonstrated close agreement between experimental and theoretical DOS distributions for six test samples (2.7–6.7% normalized root mean square deviation).

Conclusions:

  • SEES is a viable quantitative analysis tool for LVSEM.
  • The high accuracy achieved by SEES opens new avenues for material characterization.
  • SEES can enhance the capabilities of existing SEM and SAM instruments for advanced analysis.