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Updated: Nov 25, 2025

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
ENTHALPY OF FORMATION OF AQUEOUS HYDROFLUORIC ACID: REVISION NEEDED?
Eugene Paulechka1, Andrei Kazakov1
1Thermodynamics Research Center, Applied Chemicals and Materials Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305-3337.
Abstract:
Accurate enthalpies of formation of hydrofluoric acid in the gas and liquid states as well as in aqueous solutions are critical for reduction and interpretation of combustion calorimetry data for fluorinated compounds. Analysis of current recommendations reveals inconsistencies with the existing literature that can significantly affect experimental values derived using these recommendations. Through thorough and comprehensive analysis of available experimental data, including the sources not considered before, we provide recommendations that substantially improve consistency with these results. However, the scatter in the existing data also prevents further improvements and uncertainty reduction. New experimental data, particularly for aqueous HF solutions, are needed to advance.
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