Related Experiment Video
Updated: Nov 24, 2025

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
The optical density and topography characterizations of MWCNTs on Ni-Cu/ a-C:H substrates with different copper
Vali Dalouji1, Samira Goudarzi1, Shahram Solaymani2
1Department of Physics, Faculty of Science, Malayer University, Malayer, Iran.
Abstract:
In this article, the Ni-Cu nanoparticles (NPs) in the amorphous carbon hydrogenated thin films with different copper percentage by co-deposition of RF-plasma enhanced chemical vapor deposition were prepared using acetylene gas and Ni and Cu targets. The films deposited with 5% Cu have minimum value of the average diameter of Multi-walled Carbon Nanotubes, MWCNTs, in about of 100 nm. It can be seen that the lateral size values of the nanoparticles for films with 5% Cu have minimum value of 5.34 nm. Films deposited with 75% Cu have maximum value of optical density specially in high energy. The spectral density power of all films indicated the presence of fractal components in prominent topographies. Films deposited without Cu NPs have minimum value of fractal dimension in about of 2.96. The diagram of the bearing area versus the nanoparticles height has shown the percentage of cavities and single-layers. The single-layer contents of all films were about 95%.

