Focused Ion Beam Processing for 3D Chiral Photonics Nanostructures

Area of Science:

• Nanotechnology and Photonics
• Material Science
• Microelectronic Industry

Background:

• Focused ion beam (FIB) technology is crucial for creating and studying micro- and nano-systems.
• Recent advancements extend FIB applications to photonics, enabling complex 3D chiral structures.
• Nanoscale precision in fabrication allows tuning optical responses across a wide spectral range.

Purpose of the Study:

• To review recent advancements in using FIB for nanofabrication in photonics.
• To focus on FIB-induced deposition and milling for creating 3D chiral nanostructures and metasurfaces.
• To describe fabrication strategies and analyze the chiro-optical behavior of these nanostructures.

Main Methods:

• Utilizing focused ion beam (FIB) processing for nanofabrication.
• Employing FIB-induced deposition and FIB milling techniques.
• Fabricating 3D nanostructures and metasurfaces with intrinsic chirality.

Main Results:

• Successful fabrication of complex 3D nanostructures and metasurfaces with controlled nanoscale features.
• Demonstration of tunable optical responses through precise geometrical tailoring.
• Characterization of the chiro-optical behavior of FIB-generated chiral nanostructures.

Conclusions:

• FIB processing is a versatile tool for advanced nanophotonics fabrication.
• The developed 3D chiral nanostructures exhibit promising chiro-optical properties.
• These findings pave the way for novel nanophotonic devices in polarization control, photonic circuits, and subwavelength imaging.